Waferpedia

Towa

SL 473 D 2

Precision OpticsΦ6'Towa SL 473 D 2 family
Research Quality: 30% complete
SL 473 D 2 — Inventory photo
Fig. 01SL 473 D 2Inventory photo[1]

Wafer size

Φ6'

Power

3 Phase[1]

Optics

Laserfront SL 114[1]

What is it?

The Towa SL 473 D 2 is a laser marker with a specified wafer size of Φ6'.

What do the numbers mean?

Power & electrical2

Phase
3 Phase[1]
Accurate?
Voltage
200 V[1]
Accurate?

Wafer handling2

Transfer:[1]
Accurate?
Wafer Size
Φ6'[1]
Accurate?

Optics & imaging6

Yag Laser 1
Laserfront SL 114[1]
Accurate?
Tah Laser 2
Laserfront SL 114 L[1]
Accurate?
Laser Marker Controller
Laserfront P 3705[1]
Accurate?
Acousto Optic Q-Switch Driver 1
Laserfront SL 231g 3[1]
Accurate?
Acousto Optic Q-Switch Driver 2
NEC SL 231 GF'[1]
Accurate?
Water Sensor
Laserfront U 1040[1]
Accurate?

Control & software2

Control System:[1]
Accurate?
PC Control
NEC PC 9821 R 43 MZ[1]
Accurate?

Configuration & options4

Stepping Motor
UEXTA PK 264 A 1 SG 7.2[1]
Accurate?
Sensor:[1]
Accurate?
Power:[1]
Accurate?
40 A[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Voltage200 V[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SL 473 D 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SL 473 D 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SL 473 D 2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SL 473 D 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SL 473 D 2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SL 473 D 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Sep 24, 2026.

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