Ulvac

Enviro Downstream Microwave

Ulvac Enviro Downstream Microwave family

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

UlvacEnviro Downstream Microwave

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Power

ENI OEM-6B RF Generator^[2]

Vacuum

Edwards IQ Pump/Blower^[2]

Gas delivery

5^[2]

What it is

The Enviro Downstream Microwave Asher is a single-chamber advanced strip system.^[2]^[4]

What do the numbers mean?

Power & electrical3

Included component: ENI OEM-6B RF Generator^[2]
RF generator: ENI OEM-6B RF Generator^[2]
RF Generator: ENI OEM-6B^[2]

Vacuum & pumping3

Included component: Edwards IQ Pump/Blower^[2]
Pump/Blower: Edwards IQ Pump/Blower^[2]
Pump/Blower: Edwards IQ^[2]

Wafer handling9

Wafer size: 8 inch^[1]
Configured wafer size: 6 inch wafers^[2]
Included component: Brooks Robot^[2]
Wafer sizes: 8 inch^[1]
Configured wafer size: 6" wafers^[2]
Robot: Brooks Robot^[2]
Wafer Size: 8 inch (supported)^[1]
Wafer Size: 6 inch (currently configured)^[2]
Robot: Brooks^[2]

Gas & chemistry1

Mass Flow Controllers: 5^[2]

Control & software2

Included component: Computer^[2]
Computer: Included^[2]

Configuration & options13

Equipment type: Downstream Microwave Asher^[1]
System configuration: Single Chamber Advanced Strip System^[2]
Included component: 5 MFCs^[2]
Included documentation: Manuals^[2]
Year: 2004^[3]
OEM: Ulvac^[1]
Model: Enviro^[1]
System type: Single Chamber Advanced Strip System^[2]
MFCs: 5^[2]
Manuals: Included^[2]
Type: Downstream Microwave Asher^[1]
Chamber: Single^[2]
Year of unit: 2004^[4]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Included componentENI OEM-6B RF Generator^[2]
Included componentEdwards IQ Pump/Blower^[2]
RF generatorENI OEM-6B RF Generator^[2]
Pump/BlowerEdwards IQ Pump/Blower^[2]
RF GeneratorENI OEM-6B^[2]
Mass Flow Controllers5^[2]
Pump/BlowerEdwards IQ^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What process role does this tool serve?

The Ulvac Enviro Downstream Microwave Asher serves as a downstream ashing and strip tool.^[2]^[4]

Not publicly documented

The following facts about the Enviro Downstream Microwave are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Enviro Downstream Microwave are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Enviro Downstream Microwave are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Enviro Downstream Microwave are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Enviro Downstream Microwave are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Enviro Downstream Microwave is not on record.
Answerable by: an OEM datasheet or a fab qualification report