Waferpedia

Woollam

M-2000V

ellipsometryWoollam M-2000V family
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WoollamM-2000V
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What is it?

nanoFAB lists the J.A. Woollam M-2000V ellipsometry tool under its materials analysis capabilities, and a separate nanoFAB procedure recommends it for refractive index determination by ellipsometry when developing Optical Emission Interferometry recipes.

What can it run?

Process applications and technology nodes documented for this tool.

  • ellipsometry
  • refractive index determination
  • thin film characterization

What do the numbers mean?

Power & electrical1

recommended comparison
use either the J.A. Woollam VASE Ellipsometer or the JA Woollam M-2000V Ellipsometer[2]
Accurate?

Control & software1

recommended use
refractive index determination from deposited films for OEI recipe development[2]
Accurate?

Configuration & options2

tool type
ellipsometry[1]
Accurate?
listed alongside
J.A. Woollam VASE VB-400 ellipsometry[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • recommended comparisonuse either the J.A. Woollam VASE Ellipsometer or the JA Woollam M-2000V Ellipsometer[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What broader capability category includes the Woollam M-2000V?

It appears under materials analysis, alongside other general material analysis, testing, and metrology tools.[1]

Not publicly documented

The following facts about the M-2000V are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000V are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000V are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000V are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000V are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000V is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.ualberta.ca — nanofab.ualberta.cananofab.ualberta.ca
  2. [2]confluence.nanofab.ualberta.ca — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
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Last updated Sep 22, 2026.