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Wyko

TOPO-3D

Wyko TOPO-3D family
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The TOPO-3D is a non-contact interferometric surface profilometer developed by Wyko Corporation. The TOPO-3D uses white light interferometry to measure surface topography with sub-nanometer vertical resolution. The TOPO-3D can also utilize phase-shifting interferometry for 3D surface mapping and includes a Phase Measurement Interface controller.[1][2][3]

WykoTOPO-3D
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  • Plate 01Wyko TOPO 3D Profiler #54371

    Bid ServicellcWatch on YouTube

Vacuum

Phase-shifting interferometry (PSI)[3]

Optics

Sub-nanometer[2]

What it is

The Wyko TOPO-3D is an interferometric surface profiler developed by Wyko Corporation, which was later acquired by Veeco Instruments. The instrument is a non-contact optical profilometer that measures surface topography without physically touching the sample. The TOPO-3D uses either white light interferometry or phase-shifting interferometry (PSI) to generate detailed surface maps. The system provides sub-nanometer vertical resolution. The profiler includes a binocular eyepiece assembly, a motorized optical head, and an adjustable sample stage. A separate Phase Measurement Interface (PMI) controller unit is part of the system. The instrument can be used with interchangeable Mirau interferometric objectives of different magnifications, including PX1.5, PX5, PX20, and PX40.[2][3]

What do the numbers mean?

Vacuum & pumping1

Measurement technique
Phase-shifting interferometry (PSI)[3]
Accurate?

Optics & imaging5

Document title reference
TOPO-3D Power Spectral Density, ISO Optical Surface Specifications, and BRDF Calculations[1]
Accurate?
Vertical resolution
Sub-nanometer[2]
Accurate?
Optical head
Black turret-style[2]
Accurate?
Included objectives
PX1.5, PX5, PX20, PX40 Mirau interferometric objectives[3]
Accurate?
Document reference
TOPO-3D Power Spectral Density, ISO Optical Surface Specifications, and BRDF Calculations (1993)[1]
Accurate?

Control & software1

Controller
WYKO Phase Measurement Interface (PMI)[3]
Accurate?

Dimensions & facilities1

Measurement capability
3D surface topography, roughness, step height, waviness[2]
Accurate?

Configuration & options4

Measurement technique
White light interferometry (non-contact)[2]
Accurate?
Eyepiece
Binocular[2]
Accurate?
Form factor
Benchtop[2]
Accurate?
Sample stage
Adjustable[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Measurement techniquePhase-shifting interferometry (PSI)[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What measurement techniques does the Wyko TOPO-3D use?

The TOPO-3D uses white light interferometry and phase-shifting interferometry (PSI) to measure surface topography.[2][3]

What is the vertical resolution of the Wyko TOPO-3D?

The instrument provides sub-nanometer vertical resolution.[2][3]

Who developed the Wyko TOPO-3D?

The TOPO-3D was developed by Wyko Corporation, which was later acquired by Veeco Instruments.[2][3]

What components does the Wyko TOPO-3D system include?

The system includes the profiler head, a Phase Measurement Interface (PMI) controller unit, and a set of interferometric objectives.[3]

Not publicly documented

The following facts about the TOPO-3D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TOPO-3D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the TOPO-3D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TOPO-3D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TOPO-3D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TOPO-3D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]recycledgoods.com — recycledgoods.comrecycledgoods.com
  3. [3]recycledgoods.com — recycledgoods.comrecycledgoods.com
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Last updated Sep 22, 2026.

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