YES
1224
The YES-1224 is a chemical vapor deposition system for silane coating. The YES-1224 is designed for surface coating of MEMS devices to reduce stiction. The YES-1224 provides reproducible process control through vapor deposition.[1][2]
What it is
The YES 1224 is a vapor deposition system for semiconductor-related surface treatment.[3][2]
The YES 1224 is used for chemical vapor deposition applications that modify surfaces by depositing thin films.[2]
How it works
General reference — not yet source-verifiedA vapor deposition system exposes a prepared surface to vapor-phase chemistry so a thin coating forms on the substrate.
The vapor phase route is used for surface functionalization because the deposited chemistry can be applied with controlled repeatability.
Where it fits in the process flow
General reference — not yet source-verifiedThe YES 1224 fits in the surface-preparation portion of a process flow before later assembly or packaging steps that depend on controlled surface chemistry.
Applications
The YES 1224 is used for silane coating for MEMS, semiconductor surface modification, copper capping, BioMEMS packaging, glass slide surface modification, and DNA and oligonucleotide adhesion.[2]
- Silane coating for MEMS
- MEMS device packaging
- Precise surface modification
- Semiconductor surface modification
- Copper capping
- BioMEMS packaging
- Glass slide surface modification
- DNA and oligonucleotide adhesion
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Stiction in MEMS device packaging is described as reduced by hydrophobic coating
What do the numbers mean?
Gas & chemistry2
Configuration & options3
- Process characteristic
- Controls the functionalization process so results are precisely reproducible, run-to-run[2]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-1224P | — | — | — | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What types of materials can be deposited with a system of this class?General reference — not yet source-verified
Systems of this class can deposit a wide variety of materials including metals (such as aluminum, silver, copper), dielectrics (silicon dioxide, titanium dioxide), and other compounds, provided they can be evaporated or sputtered without decomposition. The specific source type limits the material range; for example, thermal evaporation works with materials that have high vapor pressures at relatively low temperatures, while electron-beam evaporation handles higher-melting-point materials.
What maintenance is typically required for a deposition system of this class?General reference — not yet source-verified
Routine maintenance includes cleaning the chamber walls to remove accumulated film buildup, replacing consumable parts such as filaments or crucibles, and servicing the vacuum pumps. Regular leak checking and calibration of the thickness monitor are also standard to maintain process repeatability. The frequency depends on usage but is generally part of a scheduled preventive-maintenance program.
Not publicly documented
The following facts about the 1224 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1224 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1224 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 1224 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1224 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 1224 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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