YES
253B-2-50-2
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve. The MKS Type 253B Exhaust Throttle Valve is designed to regulate gas removal from a vacuum chamber. The MKS Type 253B Exhaust Throttle Valve uses a 15-pin Type D connector to connect to a controller.[1]
What it is
The MKS Type 253B is an exhaust throttle valve.[1]
What can it run?
Process applications and technology nodes documented for this tool.
- Vacuum chamber gas flow control
- Exhaust throttling
- Use with high vacuum pumps including Roots blower, diffusion, turbo, and cryo pumps
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The manual warns that operating with high vacuum diffusion pumps requires the pressure above the oil vapor jet not to exceed 0.5 milliTorr.
- The manual states that routine cleaning may be necessary due to buildup of process contaminants.
What do the numbers mean?
Power & electrical1
Vacuum & pumping3
Optics & imaging1
Control & software1
Configuration & options7
- Heated valve body operating temperature
- 80° to 90° C (176° to 194° F) for 20° to 40° C (68° to 104° F) ambient[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 253B-2-50-2 | — | — | KF Style ISO valve with KF-50 mounting flange; 2.000 in (50.8 mm) inside diameter; 3.25 in (82.6 mm) outside diameter unheated and 3.50 in (88.9 mm) with heater option; controllable conductance 0.70 to 300 l/sec; thickness 2.00 in (50.8 mm); overall height 9.14 in (232.2 mm) unheated and 9.31 in (236.5 mm) with heater option. | nanofab.utah.edu[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Type 253B?
The Type 253B is an exhaust throttle valve.[1]
Not publicly documented
The following facts about the 253B-2-50-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-2-50-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 253B-2-50-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 253B-2-50-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 253B-2-50-2 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 253B-2-50-2 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
Last updated Oct 9, 2026.
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