Comparison ledger
Applied Materials 0010-03254 E Chuck, MKS Series 49UL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Series 49ULMKS |
|---|---|---|
| OEM | Applied Materials | MKS |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2020 Release announcement |
| Control system | — | — |
| Generation | — | — |
| Family | — | MKS Series 49UL |
| Specifications | ||
| Heater jacket material | — | Polyimide or Teflon[1] |
| Temperature range | — | 25°C to 200°C[1] |
| Local LED status display | — | Included[1] |
| Low particulate generation and low VOC | — | Designed for low particulate generation and low VOC emissions[1] |
| Product type | — | Thermal Management System[1] |
| Heater jacket materials | — | Polyimide or Teflon heater jacket[1] |
| Heater jacket options | — | S49UL Polyimide Heater; S49UL PTFE-Woven Heater[2] |
| Temperature setting range | — | 35°C to 200°C[2] |
| Status display | — | Local LED status display[1] |
| Communications | — | Modbus RTU over RS485[2] |
| Compliance | — | CE; UL 61010-1 Recognized[2] |
| Safety certification | — | UL Recognized for Measurement and Control Safety[2] |
| Supply voltage | — | 100-120 VAC or 200-240 VAC, 50/60 Hz[2] |