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MKS

Series 49UL

MKS Series 49UL family
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The MKS Series 49UL is a thermal management system for heater jackets. The MKS Series 49UL uses polyimide or PTFE-woven heater jacket options. The MKS Series 49UL has a temperature range up to 200°C.[1][2]

MKSSeries 49UL
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What it is

The MKS Series 49UL is a thermal management system built around heater jackets, a controller, and a user interface. The Series 49UL is used for controlled heating in semiconductor, analytical, and other advanced industrial settings.[2][3]

How it works

The Series 49UL uses heater jackets that wrap around components to provide controlled heat. The system combines power and communications in one assembly to simplify installation and networked control.[2]

The Series 49UL controller supports RS485 Modbus RTU communications and can be accessed through a tablet-based application. The controller provides adjustable temperatures, alarm control, status indication, remote setup, and diagnostics across a heater network.[2][3]

The heater jackets use either Polyimide or PTFE materials. The heater construction is intended to support high operating temperature, thermal efficiency, low particulate generation, and low volatile organic compound outgassing.[2]

Where it fits in the process flow

The Series 49UL fits into process lines where components, lines, or auxiliary vessels need stable temperature control. The system is used to help prevent condensation and solidification in heated process hardware.[2][4]

The Series 49UL is used with process equipment such as gas analyzers, endpoint detectors, bubbler cylinders, mass flow controllers, manometers, and valves. The system is also applied to analytical instruments, evaporators, chambers, and custom heater assemblies.[2]

Applications

The Series 49UL is used in etch, CVD, PECVD, MOCVD, LPCVD, epitaxy, ALD, and gauge-tree applications. The system is used to reduce solid buildup, maintain uniform temperature, and support thermal control in these processes.[2]

What do the numbers mean?

Power & electrical1

Supply voltage
100-120 VAC or 200-240 VAC, 50/60 Hz[2]
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Control & software1

Safety certification
UL Recognized for Measurement and Control Safety[2]
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Configuration & options11

Heater jacket material
Polyimide or Teflon[1]
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Temperature range
25°C to 200°C[1]
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Local LED status display
Included[1]
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Low particulate generation and low VOC
Designed for low particulate generation and low VOC emissions[1]
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Product type
Thermal Management System[1]
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Heater jacket materials
Polyimide or Teflon heater jacket[1]
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Heater jacket options
S49UL Polyimide Heater; S49UL PTFE-Woven Heater[2]
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Temperature setting range
35°C to 200°C[2]
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Status display
Local LED status display[1]
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Communications
Modbus RTU over RS485[2]
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Compliance
CE; UL 61010-1 Recognized[2]
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Vintage & configurations

  1. 2020Release announcement[3]

    MKS announced the Series 49UL Thermal Management System on February 11, 2020.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Supply voltage100-120 VAC or 200-240 VAC, 50/60 Hz[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What communication protocol does the Series 49UL controller use?

The Series 49UL controller uses Modbus RTU over RS485.[2]

Not publicly documented

The following facts about the Series 49UL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the Series 49UL are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Series 49UL are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Series 49UL are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Series 49UL is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Series 49UL are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]api.p1.mks.com — api.p1.mks.comapi.p1.mks.com
  2. [2]api.p1.mks.com — api.p1.mks.comapi.p1.mks.com
  3. [3]semiconductor-digest.com — semiconductor-digest.comsemiconductor-digest.com
  4. [4]SERIES 49UL HEATER JACKETS TECHNICAL NOTE - IMAPS 3D InCites Content Platform — 3dincites.com3dincites.com
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Last updated Oct 8, 2026.

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