Waferpedia

Comparison ledger

0010-13622 RF Match forversusPeva 900 E

Applied Materials 0010-13622 RF Match for, ASM Peva 900 E, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size—planetary wafer system
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forASM Peva 900 E
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]4 crucible turret[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Wafer size—planetary wafer system[2]
Gas—Ti, Ni, Ag[2]
OS—Windows XP[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing