Waferpedia

ASM

Peva 900 E

ASMPeva 900 E
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Wafer size

planetary wafer system

Gas delivery

Ti, Ni, Ag[1]

What is it?

The ASM Peva 900 E is a planetary wafer system with a 4-crucible turret.

What do the numbers mean?

Wafer handling1

Wafer size
planetary wafer system[1]
Accurate?

Gas & chemistry1

Gas
Ti, Ni, Ag[1]
Accurate?

Configuration & options3

4 crucible turret[1]
Accurate?
Advanced System Technology[1]
Accurate?
OS
Windows XP[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasTi, Ni, Ag[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Peva 900 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Peva 900 E are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Peva 900 E are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Peva 900 E are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Peva 900 E are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Peva 900 E is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Sep 24, 2026.

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