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0010-22161 High EFF RF Matchversus5200

Applied Materials 0010-22161 High EFF RF Match, ESI 5200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
5200ESI
OEMApplied MaterialsESI
Category——
Wafer size——
Process node——
Introduced——
Production run——
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FamilyApplied Materials 0010-22161 High EFF RF MatchESI 5200
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Rep Rate Range (kHz)—3-20[3]
Max Work Surface Power (W)—1.9[3]
Pulse Width (ns)—22+/-10 @3kHz, 35 @10kHz, 55+/-30 @18kH[3]
Repetition Rate Range—3-20 kHz[3]
Max Work Surface Power—1.9 W[3]
Pulse Width @3kHz—22±10 ns[3]
Pulse Width @10kHz—35 ns[3]
Pulse Width @18kHz—55±30 ns[3]
Vintage—1998[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing