Waferpedia

ESI

5200

ESI 5200 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

5200 — Inventory photo
Fig. 015200Inventory photo[1]

What it is

The ESI 5200 laser operates at a repetition rate range of 3 to 20 kHz, with a maximum work surface power of 1.9 W. The pulse width varies with frequency: 22 ±10 ns at 3 kHz, 35 ns at 10 kHz, and 55 ±30 ns at 18 kHz.[1]

What do the numbers mean?

Power & electrical6

Rep Rate Range (kHz)
3-20[1]
Accurate?
Pulse Width (ns)
22+/-10 @3kHz, 35 @10kHz, 55+/-30 @18kH[1]
Accurate?
Repetition Rate Range
3-20 kHz[1]
Accurate?
Pulse Width @3kHz
22±10 ns[1]
Accurate?
Pulse Width @10kHz
35 ns[1]
Accurate?
Pulse Width @18kHz
55±30 ns[1]
Accurate?

Configuration & options3

Max Work Surface Power (W)
1.9[1]
Accurate?
Max Work Surface Power
1.9 W[1]
Accurate?
Vintage
1998[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Rep Rate Range (kHz)3-20[1]
  • Pulse Width (ns)22+/-10 @3kHz, 35 @10kHz, 55+/-30 @18kH[1]
  • Repetition Rate Range3-20 kHz[1]
  • Pulse Width @3kHz22±10 ns[1]
  • Pulse Width @10kHz35 ns[1]
  • Pulse Width @18kHz55±30 ns[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 5200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 5200 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 5200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 5200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 5200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 10, 2026.

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