Comparison ledger
Applied Materials 0021 32427 Part, Edwards IH 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0021 32427 PartApplied Materials | IH 1000Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0021 32427 Part | Edwards IH 1000 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Cooling Plare, Countermatch,300mm Produc[5] | Without Invrt[1] |
| Typical peak pumping speed (60 Hz) | — | 1000 m³/h[4] |
| Typical peak pumping speed (50 Hz) | — | 950 m³/h[4] |
| Typical ultimate vacuum (60 Hz) | — | 1×10⁻³ mbar[4] |
| Typical ultimate vacuum (50 Hz) | — | 2×10⁻³ mbar[4] |
| Mass | — | 430 kg[4] |
| Noise level (at 1 m with enclosure) | — | <69 dB(A)[4] |
| Inlet connection | — | ISO100 bolted[4] |
| Outlet connection | — | NW40[4] |
| HCDP pump oil charge (gearbox) | — | 0.75 litres (typical)[4] |
| HCMB pump oil charge (gearbox) | — | 0.78 litres (typical)[4] |
| Full load current (460 V, 60 Hz) | — | 13 A[4] |
| HCMB motor rating | — | 2.6 kW (60 Hz)[4] |
| Maximum power input to both pump motors (60 Hz) | — | 7.8 kW[4] |
| Cooling-water minimum flow rate | — | 4 l·min⁻¹[4] |
| Maximum cooling-water supply pressure | — | 100 psig (6.9 bar)[4] |
| Nitrogen supply pressure range | — | 20 to 100 psig (2.4 to 7.9 bar)[4] |
| Typical ultimate vacuum with shaft-seals purge only (60 Hz) | — | 1 x 10^-3 mbar[4] |
| Typical ultimate vacuum with shaft-seals purge only (50 Hz) | — | 2 x 10^-3 mbar[4] |
| Noise level (measured at 1 m with enclosure panels fitted) | — | <69 dB(A)[4] |
| Electrical supply voltage options | — | 200-208/380-415 V at 50 Hz; 200-208/230/460 V at 60 Hz[4] |
| Pump configuration | — | HCDP80 dry pump with HCMB1000 mechanical booster pump[4] |
Plan your fab
Building a Lab & Support Equipment process? Get a complete equipment list.
Open the fab equipment planner →