Comparison ledger
Canon FPA 2500 i 2, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 2500 i 2Canon | 1505 G 6 ENikon |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1988– |
| Lifecycle | — | — |
| Lifecycle milestones | 1993 Vintage (6 inch unit) · 1994 Vintage (8 inch unit) | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 2500 | Nikon 1505 |
| Specifications | ||
| Missing | chamber, cover[1] | — |
| Manufacturer | Canon[2] | — |
| Model | FPA 2500 i 2[2] | 1505 G 6 E[3] |
| Type | Stepper[2] | — |
| Wafer Size (6 inch) | 6 inch[2] | — |
| Wafer Size (8 inch) | 8 inch[1] | — |
| Vintage (6 inch unit) | 1993[2] | — |
| Vintage (8 inch unit) | 1994[1] | — |
| Configuration | — | 5" reticle[3] |
| Resolution | — | 650 nm[4] |
| Numerical Aperture | — | 0.54[4] |
| Reduction | — | 5x[4] |
| Exposure Field | — | 15 x 15 mm[4] |
| Alignment Accuracy | — | 130 nm[4] |
| Wafer Size | — | 4 inch[3] |
| Light Source | — | g-line[5] |
| Introduction Year | — | 1988[4] |
| NA (Numerical Aperture) | — | 0.54[4] |
| Make | — | Nikon[3] |
| Category | — | Stepper[3] |
| Wafer Sizes | — | 4 inch[3] |
| Exposure type | — | g-line[4] |
| NA | — | 0.54[4] |
| Exposure field | — | 9.3 x 18.8 mm[4] |
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