Comparison ledger
CHA 1000, CHA 1000 E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000CHA | 1000 E-BeamCHA |
|---|---|---|
| OEM | CHA | CHA |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CHA 1000 | CHA 1000 |
| Specifications | ||
| Configuration | 6 Pocket E-gun[1] | CTI 10 Cryopump with lines, cable and compressor[3] |
| System Base Pressure | 5x10^-7 Torr[1] | — |
| Category | Deposition[2] | Deposition[4] |
| Wafer size | 5 inch[1] | — |
| Equipment type | Evaporator system[2] | E-Beam Evaporator[3] |
| E-gun | 6-pocket[1] | — |
| Power supply | SR 10 Power Supply[2] | — |
| Wafer handling | Tri Dome System 5" wafers (21 wafers total)[1] | — |
| Pump down rate | to base pressure in under 60 minutes[1] | — |
| Deposition controller | Inficon Deposition Controller[1] | — |
| Rate controller | Inficon Dep Rate Controller[2] | — |
| Sensor | Single Crystal Sensor (Fix Top Mounted)[1] | — |
| Chamber | Water Cooled Chamber[1] | — |
| Automatic control | Automatic Pump Down and Regen Controller[1] | — |
| OEM | — | CHA[3] |
| Model | — | 1000 E-Beam[3] |
| Vacuum & pumping | — | CTI 10 Cryopump with lines, cable and compressor[4] |
| Control & software | — | New touch screen valve controller (1 year warranty)[4] |
| Configuration & options | — | Lift Off Dome[4] |
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