Comparison ledger
Disco 321, Disco DFD 6340 Fully Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DFD 6340 Fully Automatic Dicing |
| Specifications | ||
| OEM | Disco[1] | — |
| Model | 321[1] | — |
| Equipment type | Wafer Dicing Saw[1] | — |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Maximum workpiece size | — | ø8"[4] |
| X-axis cutting range | — | 210 mm[4] |
| Maximum cutting speed | — | 600 mm/s[4] |
| Y1-axis cutting range | — | 210 mm[4] |
| Y1-axis index step | — | 0.0001 mm[4] |
| Y2-axis index positioning accuracy | — | 0.002/210 (single error) / 0.002 or less/5[4] |
| Z1-axis maximum stroke | — | 19.22 mm[4] |
| Z1-axis moving resolution | — | 0.00005 mm[4] |
| Z2-axis repeatability accuracy | — | 0.001 mm[4] |
| Maximum blade size | — | ø58 mm[4] |
| θ-axis maximum rotating angle | — | 380°[4] |
| Spindle output | — | 1.2 kW at 60,000 min-1[4] |
| Spindle rated torque | — | 0.19 N·m[4] |
| Spindle revolution speed range | — | 6,000 ~ 60,000 min-1[4] |
| Applicable tape frame | — | 2-8-1[4] |
| Power supply | — | 200 ~ 240 V AC ±10%, 3-phase (50/60 Hz)[4] |
| Power consumption (when processing) | — | 2.1 kW (for reference)[4] |
| Power consumption (during warm-up) | — | 1.8 kW (for reference)[4] |
| Maximum power | — | 6.9 kVA[4] |
| Air pressure | — | 0.5 ~ 0.8 MPa[4] |
| Air maximum consumption | — | 378.0 L/min (ANR)[4] |
| N2 pressure | — | 0.5 ~ 0.8 MPa[4] |
| N2 maximum consumption | — | 216.0 L/min (ANR)[4] |
| Cutting water pressure | — | 0.2 ~ 0.4 MPa[4] |
| Cutting water maximum flow rate | — | 12 L/min[4] |
| Water curtain maximum flow rate | — | 1 L/min[4] |
| Other water maximum flow rate | — | 1 L/min[4] |
| Cooling water pressure | — | 0.2 ~ 0.4 MPa[4] |
| Cooling water flow rate | — | 3.0 L/min at 0.3 MPa[4] |
| Exhaust duct capacity | — | 5.0 m³/min[4] |
| Machine dimensions (W x D x H) | — | 1,180 x 1,110 x 1,850 mm[4] |
| Machine weight (without transformer) | — | Approximately 1,600 kg[4] |
| Machine weight (with transformer for overseas use) | — | Approximately 1,670 kg[4] |
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