Waferpedia

Comparison ledger

IH 1000versus-Mist 850 Electronic Air Filter

Edwards IH 1000, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IH 1000Edwards
OEMEdwardsTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEdwards IH 1000Tri -Mist 850 Electronic Air Filter
Cited variants
  • IH 1000 Pump - Without Invrt - Fully refurbished[1]
  • IH 1000 Pump - With Invrt[2]
  • IH 1000 Pump - Rear[3]
  • iH1000F[4]
—
Specifications
ConfigurationWithout Invrt[1]—
Typical peak pumping speed (60 Hz)1000 m³/h[4]—
Typical peak pumping speed (50 Hz)950 m³/h[4]—
Typical ultimate vacuum (60 Hz)1×10⁻³ mbar[4]—
Typical ultimate vacuum (50 Hz)2×10⁻³ mbar[4]—
Mass430 kg[4]—
Noise level (at 1 m with enclosure)<69 dB(A)[4]—
Inlet connectionISO100 bolted[4]—
Outlet connectionNW40[4]—
HCDP pump oil charge (gearbox)0.75 litres (typical)[4]—
HCMB pump oil charge (gearbox)0.78 litres (typical)[4]—
Full load current (460 V, 60 Hz)13 A[4]—
HCMB motor rating2.6 kW (60 Hz)[4]—
Maximum power input to both pump motors (60 Hz)7.8 kW[4]—
Cooling-water minimum flow rate4 l·min⁻¹[4]—
Maximum cooling-water supply pressure100 psig (6.9 bar)[4]—
Nitrogen supply pressure range20 to 100 psig (2.4 to 7.9 bar)[4]—
Typical ultimate vacuum with shaft-seals purge only (60 Hz)1 x 10^-3 mbar[4]—
Typical ultimate vacuum with shaft-seals purge only (50 Hz)2 x 10^-3 mbar[4]—
Noise level (measured at 1 m with enclosure panels fitted)<69 dB(A)[4]—
Electrical supply voltage options200-208/380-415 V at 50 Hz; 200-208/230/460 V at 60 Hz[4]—
Pump configurationHCDP80 dry pump with HCMB1000 mechanical booster pump[4]—

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]nanofab.utah.edunanofab.utah.edu