Comparison ledger
Lam Research 2300 Flex 45, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2300 Flex 45Lam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research 2300 | Tegal 1512e |
| Specifications | ||
| Configuration | Metal HP MWS[1] | — |
| 3 Chambers | Insulating Film / Metal / Ashing[1] | — |
| Make | Lam[1] | — |
| Model | 2300 Flex 45[1] | — |
| Equipment type | Etcher[1] | — |
| Chambers | 3 chambers[1] | — |
| Process coverage | Insulating film / Metal / Ashing[1] | — |
| Gases used for insulating film | C4F8, CF4, CH3F[1] | — |
| Gases used for metal | Cl2, BCl3[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[3] |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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