Comparison ledger
Nikon 1505 G 6 E, OGP ShapeGrabber Ai 310, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505 G 6 ENikon | |
|---|---|---|
| OEM | Nikon | OGP |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1988– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon 1505 | OGP (Optical Gaging Products) ShapeGrabber Ai 310 |
| Specifications | ||
| Configuration | 5" reticle[1] | with computer[4] |
| Resolution | 650 nm[2] | — |
| Numerical Aperture | 0.54[2] | — |
| Reduction | 5x[2] | — |
| Exposure Field | 15 x 15 mm[2] | — |
| Alignment Accuracy | 130 nm[2] | — |
| Wafer Size | 4 inch[1] | — |
| Light Source | g-line[3] | — |
| Introduction Year | 1988[2] | — |
| NA (Numerical Aperture) | 0.54[2] | — |
| Make | Nikon[1] | OGP (Optical Gaging Products)[4] |
| Model | 1505 G 6 E[1] | ShapeGrabber Ai 310[4] |
| Category | Stepper[1] | — |
| Wafer Sizes | 4 inch[1] | — |
| Exposure type | g-line[2] | — |
| NA | 0.54[2] | — |
| Exposure field | 9.3 x 18.8 mm[2] | — |
| Type | — | Automated 3D laser scanner[5] |
| Part size target | — | Small to medium complex-shaped parts[5] |
| Form factor | — | Compact, fits on workbench or standard inspection table[5] |
| Equipment name | — | ShapeGrabber Ai 310 Laser Scanner[4] |
| Description | — | Automated laser scanner[5] |
| Intended use | — | Scanning small to medium complex-shaped parts[5] |
| Associated configuration | — | With computer[4] |
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