Comparison ledger
Plasma-Therm Versaline LACVD, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Versaline LACVDPlasma-Therm | 1512eTegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm Versaline | Tegal 1512e |
| Specifications | ||
| Configuration | 2x loadlock Ports[1] | — |
| Operating system | Windows 7 Professional SP1 OS[1] | — |
| Tool software | Plasma-Therm Cortex[1] | — |
| OES Software | Plasma-Therm EndpointWorks[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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