Comparison ledger
SCREEN FC 821, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FC 821SCREEN | 11600 SRDSemitool |
|---|---|---|
| OEM | SCREEN | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN FC 821 | Semitool 11600 SRD |
| Specifications | ||
| Configuration | Frame, 5 ch, 2 baths[1] | Ceramic[2] |
| Wafer Size | 8 inch[1] | — |
| Chambers | 5[1] | — |
| Baths | 2[1] | — |
| Vintage | 2020[1] | — |
| Manufacturer | — | Semitool[2] |
| Model | — | 11600 SRD[2] |
| Equipment type | — | Spin Rinse Dryer[2] |
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