Comparison ledger
Semitool 421 Scepter Spray Solvent, Semitool 421 Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 421 Scepter Spray SolventSemitool | 421 Spray SolventSemitool |
|---|---|---|
| OEM | Semitool | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Batch Solvent Processor for Wafer Cleaning | Batch Solvent Processor for Wafer Cleaning |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 421 | Semitool 421 |
| Cited variants |
|
|
| Specifications | ||
| Wafer size | Batch Solvent Processor for Wafer Cleaning[2] | Batch Solvent Processor for Wafer Cleaning[5] |
| Configuration | Max Substrate Size of 8”/200mm[2] | Single Chamber[5] |
| Maximum substrate size | 200 mm (8 inch)[2] | — |
| Batch capacity | Up to 50 wafers[3] | — |
| Chamber type | Single chamber[3] | — |
| Automation level | Semi-automated[3] | — |
| Number of tanks | 4 stainless steel (2 heated, 2 ambient)[4] | — |
| Process applications | Polymer removal, resist stripping, wafer cleaning, metal lift-off[4] | — |
| OEM model number | SST-421[4] | — |
| Also known as | Scepter Spray Solvent Tool (SST)[2] | — |
| Maximum wafer count per batch | 50 wafers[2] | — |
| Number of heated tanks | 2[4] | — |
| Rotor included | 1 rotor (select size at time of order)[4] | — |
| Touch screen | Class 1 Touch Screen Monitor[1] | — |
| Pumps | Pneumatic pumps, Trebor 610 back[1] | — |
| Process Applications | — | Polymer Removal, Resist Stripping, Wafer Cleaning, Metal Lift-Off[5] |
| Max Wafer Size | — | 8"/200mm Wafers[5] |
| Chamber Type | — | Single Chamber[5] |
| Number of Tanks | — | 4[5] |
| Heated Tanks | — | 2[5] |
| Ambient Tanks | — | 2[5] |
| Rotor Included | — | 1[5] |
| Max Wafers per Batch | — | 50 wafers[3] |
| Vintage | — | 2004[5] |
| Wafer Size | — | 200 mm[1] |
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