Semitool
421 Spray Solvent
What it is
The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor designed for wafer cleaning. The system handles wafers up to 200 mm in diameter. The SST 421 is a single-chamber system. The system includes a single rotor. The tool is equipped with four stainless steel tanks, of which two are heated and two are ambient. The tool is available in semi-automated or automated configurations. Some versions are designated SST-421.[1][2][4]
How it works
The SST 421 uses a single processing chamber. The system includes a rotor that can be selected for the desired wafer size. Four stainless steel tanks supply solvents and rinse liquids. Two of these tanks can be heated to increase chemical activity. The tool employs pneumatic pumps for fluid delivery. A Class 1 touch screen monitor provides operator control.[1][4][3]
Applications
What do the numbers mean?
Wafer handling6
Configuration & options10
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SST 421-280 | — | — | Upgraded with hfsemi CPU-System, Class 1 Touch Screen Monitor, Pneumatic Pumps, Trebor 610 back | hfsemi.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many tanks does the SST 421 have?
The system has four stainless steel tanks: two heated and two ambient.[1][4][3]
Is the tool automated or semi-automated?
The SST 421 is available in both semi-automated and automated configurations.[2][4]
What is the wafer capacity per batch?
The system is capable of processing up to 50 wafers per batch.[2]
Not publicly documented
The following facts about the 421 Spray Solvent are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 421 Spray Solvent are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 421 Spray Solvent are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 421 Spray Solvent are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 421 Spray Solvent is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 421 Spray Solvent are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [3]hfsemi.com — hfsemi.comhfsemi.com
- [4]Semitool Spray Solvent Tool (SST-421) | Used | ClassOne — classoneequipment.comclassoneequipment.com
Last updated Sep 23, 2026.
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