Waferpedia

Tool family

Semitool 421

Semitool2 entries

Models in this family

  1. The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    SST 421-280——Upgraded with hfsemi CPU system, class 1 touch screen monitor, pneumatic pumps, Trebor 610 backhfsemi.com[1]
  2. The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.

    Cited variants

    DesignationGenerationVintageChangesSource
    SST 421-280——Upgraded with hfsemi CPU-System, Class 1 Touch Screen Monitor, Pneumatic Pumps, Trebor 610 backhfsemi.com[1]

All entries

  1. 421 Scepter Spray SolventSemitool

    The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.

    CategoryWet Processing / CleanWaferBatch Solvent Processor for Wafer Cleaning
    18 specs
  2. 421 Spray SolventSemitool

    The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.

    CategoryWet Processing / CleanWaferBatch Solvent Processor for Wafer Cleaning
    16 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]hfsemi.comhfsemi.com