Comparison ledger
Tegal 1512e, Tokyo Electron Telius Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | Telius DryTokyo Electron |
|---|---|---|
| OEM | Tegal | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tokyo Electron Telius |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | — |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Configuration | — | HDD[2] |
| Equipment type | — | Dry Etcher[3] |
| Manufacturer | — | TEL Tokyo Electron[3] |
| Model | — | Telius[2] |
| Wafer size | — | 12 inch[2] |
| Wafer size/version | — | 300 mm[3] |
| Vintage (unit) | — | 01.06.2004[4] |
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