Comparison ledger
Tegal 1512e, Ulvac NE 950 ICP-RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | NE 950 ICP-RIEUlvac |
|---|---|---|
| OEM | Tegal | Ulvac |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Ulvac NE 950 |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | — |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Configuration | — | Gas Box:[2] |
| Gas 1 Horiba STEC SEC-E40 Ar | — | 100SCCM[2] |
| Gas 2 Horiba STEC SEC-E40 O2 | — | 100SCCM[2] |
| Gas 3 Horiba STEC SEC-E40 CHF3 | — | 100SCCM[2] |
| Cooling Gas | — | MKS 649A 50SCCM[2] |
| Match Box 1 | — | AMV-1000-12.5M-CT[2] |
| Match Box 2 | — | AMV-1000-AV3[2] |
| Valve | — | MKS T3PIA 26696[2] |
| Gauge | — | MKS E28D[2] |
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