Comparison ledger
Agilent PD 03 Helium Leak Detector, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PD 03 Helium Leak DetectorAgilent | |
|---|---|---|
| OEM | Agilent | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent PD 03 | KLA .204 PSL Wafer |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Refurbished in 2019, replaced an oil fore pump with a Teflon scroll pump[2] | NIST Traceable[4] |
| Primary pump type | Dry scroll pump[1] | — |
| Pumping speed | 3 m³/hr[1] | — |
| Minimum detectable leak rate | ≤ 5·10⁻¹² mbar·l/s[1] | — |
| Maximum inlet pressure | 13 mbar[1] | — |
| Helium pumping speed | 1.8 l/s[1] | — |
| Measurement ranges | 12 decades[1] | — |
| Time until ready | ≤ 2 min[1] | — |
| Response time | < 0.5 sec[1] | — |
| Dimensions (W x H x D) | 625 x 403 x 517 mm[1] | — |
| Display | 8.4 inch color TFT touch screen[3] | — |
| Interface | RS232 and analog (standard), discrete IO (optional)[1] | — |
| Operating voltage | 100-120 or 200-230 V, 50/60 Hz[3] | — |
| Remote control range | 100 meters[1] | — |
| Languages | Chinese, English, French, German, Japanese, Korean, Russian, Spanish[3] | — |
| Conforms to | CE, UL, CSA standards[1] | — |
| Application setups | Six pre-programmed key applications[3] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[4] |
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