Waferpedia

Comparison ledger

0020 23839 PartversusPeva 900 E

Applied Materials 0020 23839 Part, ASM Peva 900 E, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size—planetary wafer system
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartASM Peva 900 E
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]4 crucible turret[2]
Wafer size—planetary wafer system[2]
Gas—Ti, Ni, Ag[2]
OS—Windows XP[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing