Comparison ledger
Applied Materials eMax CT Plus Dielectric, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eMax CT Plus DielectricApplied Materials | 1512eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials eMax | Tegal 1512e |
| Specifications | ||
| Configuration | Alcatel ATH 1600 M Turbo Pump[1] | — |
| Bias | 13.5 MHz (Bias) & 2 MHz (LF Bias)[1] | — |
| LF Bias | Daihen RMN-50N1[1] | — |
| Source | Daihen AMN-30 H 60 MHz[1] | — |
| Gate Valve | Nor-Cal / NC-95-PP[1] | — |
| FIB | eFib, wFib[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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