Waferpedia

Comparison ledger

1000 Hot Plateversus5204 Diffusion

CEE 1000 Hot Plate, Thermco 5204 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
1000 Hot PlateCEE
5204 DiffusionThermco
OEMCEEThermco
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateThermco 5204 Diffusion
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]6 inch (150 mm)[2]
Flat Zone—40 inches[3]
Control System—TMX[3]
Load Station Length—Approximately 10 feet[3]
1000 Hot Plate entry5204 Diffusion entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com