Waferpedia

Comparison ledger

321versusDFG 8560

Disco 321, Disco DFG 8560, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Disco DFG
Specifications
OEMDisco[1]Disco[4]
Model321[1]DFG 8560[4]
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Phase—3 Phase[4]
Voltage—200V[4]
Configuration—3 Wire + 2 Ground[4]
Spindle Type—Air Bearings[4]
External Cooling—Water Cooled[4]
Frequency—50 / 60 Hz[5]
Full Load Amps—57 A[5]
Maximum workpiece size—300 mm[6]
Number of spindles—2[6]
Spindle power (Z1-Z3)—4.8 kW[6]
Spindle speed (Z1-Z3)—1,000 - 4,000 min⁻¹[6]
Number of work tables—3[6]
Dimensions (WxDxH)—1,400 x 3,322 x 1,800 mm[6]
Weight—approx. 4,000 kg[6]
Full load amperage—57 A[4]
Machine type—Grinder[4]
Wiring—3 Wire + 2 Ground[4]
Chiller—Disco DTU 152[4]
Category—Dicing & Grinding[6]
Automation—Fully automatic[6]
Spindle count—2[6]
Work table count—3[6]
Power—200 VAC, 3 phase, 50/60 Hz, 57 A[5]
Vintage—2011[4]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]web.archive.orgweb.archive.org