Comparison ledger
Disco 321, Meyer Burger DW 288 Wire Cutting, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | DW 288 Wire CuttingMeyer Burger |
|---|---|---|
| OEM | Disco | Meyer Burger |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | — |
| Cited variants | — | |
| Specifications | ||
| OEM | Disco[3] | — |
| Model | 321[3] | — |
| Equipment type | Wafer Dicing Saw[3] | — |
| Facility context | Cleanroom Instrumentation[3] | — |
| Application area | Nano and Micro Fabrication[3] | — |
| Location | FNT 4.106[3] | — |
| Wafer Size | Up to 6 inches[4] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[5] | — |
| Spindle Power (alternate) | 1500 Watt spindle[4] | — |
| Non-Contact Setup | Non Contact Setup[5] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[5] | — |
| Broken Blade Detection | Broken Blade Detection[5] | — |
| Light Tower | Includes Light Tower[5] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[4] | — |
| Wafer size capability | Up to 6" wafers[5] | — |
| Chuck | 6-inch porous film frame chuck[4] | — |
| Spindle power | 1500-watt spindle[4] | — |
| Footprint | Small footprint[4] | — |
| Setup | Non-contact setup[5] | — |
| Blade break detection | Broken blade detection[5] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[5] | — |
| Web length | — | 420 mm[2] |
| Wire speed | — | 25 m/s (1500 m/min)[2] |
| Wire acceleration | — | 8 m/s² (< 4 s)[2] |
| Min. wire diameter | — | 100 μm[2] |
| Max. wire tension | — | 45 N[2] |
| Rocking principle | — | Rocking of work piece[2] |
| Rocking angle | — | ±12°[2] |
| Wire guide roller axis distance | — | 540 mm[2] |
| Cutting fluid tank | — | 240 l[2] |
| Machine dimensions (L × W × H) | — | 3620 × 1780 × 3010 mm[2] |
| Machine weight | — | 10500 kg[2] |
| Max. work piece size | — | Ø 8″ × 420 mm or □ 210 × 420 mm[2] |
| Max. work piece dimensions (round) | — | Ø 206 × 420 mm[2] |
| Max. work piece dimensions (square) | — | 210 × 420 mm[2] |
| Cutting fluid tank capacity | — | 240 l[2] |
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