Waferpedia

Comparison ledger

1007versusSP4

KLA 1007, Signatone SP4, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
SP4Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Signatone SP4
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Material—Mold-injected Delrin[3]
Operating temperature—Room temperatures[3]
Tip configuration—Four tips in a straight line configuration[3]
Spacing options—40 mils, 50 mils, or 62.5 mils between probe tips[3]
Spring pressure options—45 grams, 85 grams, or 180 grams per tip[3]
Tip material options—Osmium or tungsten carbide[3]
Standard probe tip size—1.6 mil diameter[3]
Optional blunt tip radii—R=.005 for 5 mil diameter tips; R=.010 for 10 mil diameter tips[3]
Body material—Mold-injected Delrin[3]
Tip spacing options—40, 50, 62.5 mils[3]
Standard tip diameter—1.6 mil[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org