Disco DFL

Models in this family

1. 

   DFL 7161 FX
2. 

   DFL 7361

   The Disco DFL 7361 is a laser saw with a Type FX laser head, BSS-6 optics system, and integrated wafer cleaning system with atomizing nozzle.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   SECS/GEM Software	—	—	Listed as an option.	Equipment inventory listing[1]
   Intemal lighting	—	—	Listed as an option.	Equipment inventory listing[1]
   Virus-free PC	—	—	Listed as an option.	Equipment inventory listing[1]
   STM DFL7161 2021 SW unified	—	—	Listed as an option.	Equipment inventory listing[1]
   Barcode reading function for auto recipe loading	—	—	Listed as an option.	Equipment inventory listing[1]
   Compatibility with Hogomax 5L tanks	—	—	Listed as an option.	Equipment inventory listing[1]
   Change of Laser Focus Position for Maintenance	—	—	Listed as an option.	Equipment inventory listing[1]
   Additional Kerf check sequence	—	—	Listed as an option.	Equipment inventory listing[1]
   Password Modification up to Level 4	—	—	Listed as an option.	Equipment inventory listing[1]
   Disco CO2 Injector + Integration specs	—	—	Listed as an option.	Equipment inventory listing[1]
   CO2 injector (stand-alone) added	—	—	Listed as an option.	Equipment inventory listing[1]
   Addition of drain valve for CO 2 injector specific resistance value stabilization	—	—	Listed as an option.	Equipment inventory listing[1]
   CO2 water target resistivity value Settable in device data	—	—	Listed as an option.	Equipment inventory listing[1]
   CO2 bubbler support (RS232C)	—	—	Listed as an option.	Equipment inventory listing[1]
   New version Zxis assembly for DFL7161 with higher rigidity specs (standard for STM)	—	—	Listed as an option.	Equipment inventory listing[1]
   DFL7360	—	—	Different dimensions (1,715 x 3,265 x 1,998 mm) and weight (approx 2,770 kg); X-axis feed speed 1.0 - 1,000 mm/s	web.archive.org[2]
   DFL7360FH	—	—	Different dimensions (1,100 x 2,100 x 1,990 mm) and weight (approx 2,090 kg)	web.archive.org[2]
   DFL7341	—	—	Corresponding to 200mm workpiece; maximum workpiece size ø200	web.archive.org[2]
   DFL7340	—	—	Corresponding to 200mm workpiece; maximum workpiece size ø200	web.archive.org[2]
   DFL7161	—	—	Mentioned as DFL7161 model with related specifications and in options text as target of some upgrades	Equipment inventory listing[1]

3. 

   DFL 7560 L

   The Disco DFL 7560 L is a laser saw with robot wafer handling, stated for 2-inch to 4-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   200mm Fully Automatic wafer handling from/to standard wafer cassette	—	—	Machine modification includes 200mm fully automatic wafer handling from/to standard wafer cassette, chuck for 200mm wafers, new robot design for handling heavier wafers, new CE marking, 6 inch lens, and new Galvo Scanner.	Equipment inventory listing[3]

Sources