Waferpedia

Tool family

Edwards IH 1000

Edwards1 entry

Edwards IH 1000 Pump.

Models in this family

  1. The Edwards iH1000 is a dry vacuum pumping system that uses an HCDP80 dry pump with an HCMB1000 mechanical booster pump, achieving a peak pumping speed of 1000 m³/h at 60 Hz.

    Cited variants

    DesignationGenerationVintageChangesSource
    IH 1000 Pump - Without Invrt - Fully refurbished——Described as without inverter and fully refurbished.Equipment inventory listing[1]
    IH 1000 Pump - With Invrt——Described as with inverter.Equipment inventory listing[2]
    IH 1000 Pump - Rear——Described as rear.Equipment inventory listing[3]
    iH1000F——Includes Breach Sensor for leak detection during run 'til crash.nanofab.utah.edu[4]

Sources

Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]nanofab.utah.edunanofab.utah.edu