Tool family
The GEMINI is a state-of-the-art, fully automated production wafer bonding system that integrates wafer-to-wafer alignment and bonding processes in a modular design.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| GEMINI FB | — | — | Integrated platform for high precision alignment and fusion bonding; features SmartView® NT3 face-to-face bond aligner with sub 50 nm wafer-to-wafer alignment accuracy and up to six pre-processing modules. | evgroup.com[1] |
| GEMINI FB XT | — | — | Extended version that combines higher productivity with improved alignment and overlay accuracy; features XT Frame concept for highest throughput with EFEM. | evgroup.com[1] |