Waferpedia

Tool family

Onto Innovation MP 1 300 Film Thickness Measurement

Models in this family

  1. The ONTO / Rudolph MP 1 300 is a 300 mm wafer film thickness measurement tool.

    Cited variants

    DesignationGenerationVintageChangesSource
    ONTO / Rudolph MP 1 300—20032003 vintageEquipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing