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Onto Innovation

MP 1 300 Film Thickness Measurement

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The ONTO / Rudolph MP 1 300 is a film thickness measurement tool. The MP 1 300 supports 12-inch wafer sizes.[1]

Onto InnovationMP 1 300 Film Thickness Measurement
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What it is

The Onto Innovation MP 1 300 is a film thickness measurement system for semiconductor wafers.[1][3][2]

Applications

The MP 1 300 is used for wafer-level film thickness measurement in semiconductor manufacturing.[1][3][2]

What do the numbers mean?

Wafer handling2

Wafer Size
12 inch (300 mm)[1]
Accurate?
Wafer Size
12 inch[1]
Accurate?

Configuration & options1

Measurement Type
Film Thickness[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ONTO / Rudolph MP 1 300—20032003 vintageEquipment inventory listing[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of measurement does the MP 1 300 perform?

The MP 1 300 is a film thickness measurement system.[1][3][4][2]

Not publicly documented

The following facts about the MP 1 300 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MP 1 300 Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the MP 1 300 Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MP 1 300 Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MP 1 300 Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MP 1 300 Film Thickness Measurement are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
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Last updated Sep 27, 2026.

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