Tool family
SCREEN FC 821
Models in this family
The SCREEN / DNS FC 821 is a scrubber with 8-inch wafer size support.
The SCREEN FC 821 L is a wet processing station within a class of automated systems used for chemical cleaning, rinsing, and drying of substrates in semiconductor and precision component manufacturing.
All entries
- FC 821SCREEN
The SCREEN / DNS FC 821 is a scrubber with 8-inch wafer size support.
CategoryWet Processing / Clean5 specs - FC 821 LSCREEN
General referenceThe SCREEN FC 821 L is a wet processing station within a class of automated systems used for chemical cleaning, rinsing, and drying of substrates in semiconductor and precision component manufacturing.
CategoryWet Processing / CleanWaferWafer Transfer Machine15 specs