Waferpedia

Agilent

350 D

Ion ImplantationAgilent 350 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Agilent 350 D is a high-current ion implanter for semiconductor fabrication. The Agilent 350 D processes 150 mm wafers.[1]

350 D — Inventory photo
Fig. 01350 DInventory photo[2]

What it is

The Agilent 350 D is a high-current ion implanter.[1]

The Agilent 350 D processes 150 millimeter (6 inch) wafers.[1]

How it works

General reference — not yet source-verified

Ion implanters generate a beam of ionized dopant species from a source.

The beam passes through a mass analyzer to select the desired ion species.

Where it fits in the process flow

General reference — not yet source-verified

Ion implantation is a doping step typically performed after photolithography and before thermal annealing in front-end-of-line processing.

The machine introduces dopant atoms into the semiconductor substrate to modify electrical properties.

Applications

General reference — not yet source-verified

Ion implanters are used for source and drain doping, well formation, and threshold voltage adjustment in integrated circuits.

What do the numbers mean?

Wafer handling1

Wafer size
150 mm[1]
Accurate?

Configuration & options3

Has run 100mm[2]
Accurate?
Category
Ion Implantation[3]
Accurate?
Machine type
High Current Ion Implanter[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 350 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 350 D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 350 D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 350 D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 350 D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 350 D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Inventory photo
  3. [3]waferpedia.comwaferpedia.com
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Last updated Oct 8, 2026.

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