AJA
ATC Orion
The AJA ATC Orion 8 UHV Sputtering System is a PVD tool that deposits films on a substrate using magnetron sputtering. The AJA ATC Orion 8 uses accelerated, positively charged ions from a plasma source to achieve an increased deposition rate and more controlled electron bombardment compared to other sputtering systems.[1]
Plate 01Magnetron Sputtering Demonstration with ATC Orion 5 UHV
UW Clean Energy InstituteWatch on YouTube
What it is
The AJA ATC Orion is a physical vapor deposition tool for sputter deposition of thin films on substrates.[1][2]
The AJA ATC Orion 8 at Pritzker Nanofab is an UHV sputtering system with a turbo-pumped vacuum load lock and a Phase II-J computer control system.[1]
How it works
Where it fits in the process flow
Applications
The AJA ATC Orion 8 is used for corrosion-resistant coatings, low-friction coatings, hard wear-resistant coatings, and coatings with specific electrical and optical properties.[1]
The UMD FabLab uses the AJA ATC Orion 8 for multilayer depositions and lists installed targets including V2O5, FeF3, Cr, Ti, ZnO, Li3PO4, and Au.[4]
- Corrosion resistant coatings
- Low friction coatings
- Hard, wear resistant coatings
- Coatings with specific electrical and optical properties
What do the numbers mean?
Power & electrical5
Vacuum & pumping4
Wafer handling5
Gas & chemistry2
Control & software2
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum load lockTurbo-pumped vacuum load lock with 6-position cassette[1]
- Reactive sputtering gasesOxygen and nitrogen[1]
- Power sourcesDC and RF generators[1]
- OptionsRF bias option[1]
- Load lockTurbo-pumped vacuum load lock with 6 position cassette[1]
- GeneratorsDC and RF generators[1]
- RF bias optionAvailable[1]
- Deposition techniqueMagnetron sputtering (DC and RF)[1]
- Reactive gasesOxygen and nitrogen (also argon)[1]
- Base pressure (twin chamber)< 3x10^-7 Torr[2]
- Pumping (twin chamber)800 L/s turbomolecular pump on each chamber[2]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- AJA ATC Orion 8 sputtering tool SOP.pdfSOPumd.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Can the AJA ATC Orion 8 perform reactive sputtering?
Yes, the system is capable of reactive sputtering with oxygen and nitrogen.[1]
Does the AJA ATC Orion 8 support both DC and RF power?
Yes, the system is equipped with both DC and RF generators.[1]
What type of load lock does the AJA ATC Orion 8 use?
The system uses a turbo-pumped vacuum load lock with a 6-position cassette.[1]
Not publicly documented
The following facts about the ATC Orion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATC Orion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATC Orion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATC Orion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATC Orion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATC Orion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]pnf.uchicago.edu — pnf.uchicago.edupnf.uchicago.edu
- [2]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [3]ece.utoronto.ca — ece.utoronto.caece.utoronto.ca
- [4]DEP-09: AJA ATC Orion 8 Sputtering system | Equipment | Maryland NanoCenter FabLab — nanocenter.umd.edunanocenter.umd.edu
- [5]Cleanroom Facilities | Shared Equipment Authority (SEA) | Office of Research | Rice University — research.rice.eduresearch.rice.edu
- [6]HV & UHV Sputter Sources for R&D Sputtering Systems — m.ajaint.com (Jul 14, 2020)web.archive.org
Last updated Sep 22, 2026.
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