Waferpedia

Applied Materials

9500 XR

9500 XR — Inventory photo
Fig. 019500 XRInventory photo[1]

Wafer size

Wafer on Gripper Sensor

Power

208 V[1]

Vacuum

CT 10 Cryos[1]

Gas delivery

Gas Box:[1]

What it is

The Applied Materials 9500 XR is an ion implanter.[1][2]

The Applied Materials 9500 XR is configured for eight-inch wafers.[1][2]

How it works

General reference — not yet source-verified

Ion implanters accelerate dopant ions into a semiconductor wafer to change its electrical properties.

Ion implantation uses beam selection and beam steering to deliver the chosen species to the wafer surface in a controlled dose and energy range.

Where it fits in the process flow

General reference — not yet source-verified

Ion implantation is a doping step in semiconductor fabrication.

Ion implantation follows lithographic patterning and precedes annealing.

Applications

General reference — not yet source-verified

Ion implanters are used to introduce dopants into silicon wafers for transistor source and drain regions.

What do the numbers mean?

Power & electrical5

Voltage
208 V[1]
Accurate?
Phase
3 phase + Neurtal[1]
Accurate?
50/60 Hz[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?
Voltage
60 kV[1]
Accurate?

Vacuum & pumping3

Chamber
CT 10 Cryos[1]
Accurate?
Source Turbo
STP 1000 C[1]
Accurate?
Mrs Turbo
STP 400[1]
Accurate?

Wafer handling5

Wafer Loader
QDP 80[1]
Accurate?
Wafer size
Wafer on Gripper Sensor[1]
Accurate?
Wafer size
8 inch[1]
Accurate?
Wafer size / configuration
Wafer on Gripper Sensor[2]
Accurate?
Gripper
Wafer on Gripper Sensor[1]
Accurate?

Gas & chemistry2

Gas Box:[1]
Accurate?
Gas Box
BF3, PH3, AsH3[1]
Accurate?

Control & software1

Software
4.09[1]
Accurate?

Configuration & options23

Circuit Breaker
250 A[1]
Accurate?
Interrupt Capacity
65000 A[1]
Accurate?
CPU
162 031[1]
Accurate?
Source Backing
QDP 40[1]
Accurate?
Orient[1]
Accurate?
Flat Not Found Sensor[1]
Accurate?
Gripper[1]
Accurate?
Wheel
Direct Drive[1]
Accurate?
Tilt
0 to 7[1]
Accurate?
BF3
SDS[1]
Accurate?
Manufacturer
Applied Materials[1]
Accurate?
Model
9500 XR[1]
Accurate?
Category
Ion Implantation[2]
Accurate?
Orient
Flat Not Found Sensor[1]
Accurate?
Source Type
IHC Enlarged Chamber[1]
Accurate?
Oven Capabilities
Yes, No ovens fitted to source[1]
Accurate?
Source Magnet
5A[1]
Accurate?
Dual Extraction
Bellows, 60 kV, 160 kV max[1]
Accurate?
Post Acell
Total Energy: 200 kV Max[1]
Accurate?
Plasma Flood Gun
Standard[1]
Accurate?
PH3
SDS[1]
Accurate?
AsH3
SDS[1]
Accurate?
Source Type
IHC[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208 V[1]
  • Phase3 phase + Neurtal[1]
  • Configuration50/60 Hz[1]
  • ChamberCT 10 Cryos[1]
  • Source TurboSTP 1000 C[1]
  • Mrs TurboSTP 400[1]
  • ConfigurationGas Box:[1]
  • Frequency50/60 Hz[1]
  • Gas BoxBF3, PH3, AsH3[1]
  • Voltage60 kV[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 9500 XR are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9500 XR are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 9500 XR are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 9500 XR are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 9500 XR are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 9500 XR is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 7, 2026.

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