Applied Materials
Centura 5200 MXP+ SOG
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Applied Materials Centura 5200 MXP+ SOG is an 8-inch wafer etcher for spin-on glass (SOG) processes. The tool was introduced in 1996 and uses the MXP+ chamber configuration.[1]
What it is
General reference — not yet source-verifiedThe Centura platform is a multi-chamber cluster tool architecture that integrates multiple process modules around a central transfer chamber.
How it works
General reference — not yet source-verifiedSpin-on glass etch systems typically employ a plasma discharge generated from a fluorine-containing gas chemistry. The etch process removes the spin-on glass layer uniformly across the wafer surface.
In a cluster tool configuration, wafers are loaded into a loadlock and transferred under vacuum to one of several etch chambers, enabling sequential processing without breaking vacuum.
Where it fits in the process flow
General reference — not yet source-verifiedSpin-on glass is commonly used as a planarizing dielectric in multilevel interconnect structures. After spin-coating and curing, the SOG layer is etched back to achieve a flat surface for subsequent metallization layers.
The SOG etch step is typically performed after the SOG coating and cure, and before the deposition of the next dielectric or metal layer.
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the model designation of this etcher?
The model designation is Applied Materials Centura 5200 MXP+ SOG.[1]
Not publicly documented
The following facts about the Centura 5200 MXP+ SOG are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 MXP+ SOG are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura 5200 MXP+ SOG are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura 5200 MXP+ SOG are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 MXP+ SOG are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 MXP+ SOG is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 2, 2026.
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