Waferpedia

Applied Materials

DPS 2

EtchApplied Materials DPS family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Applied Materials logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Applied Materials DPS 2 is an etch tool for semiconductor manufacturing.[3]

How it works

General reference — not yet source-verified

An etch tool removes selected material from a patterned wafer surface by exposing it to a controlled plasma or reactive process while using a mask-defined pattern to preserve intended features.

Where it fits in the process flow

The Applied Materials DPS 2 sits in the dry etch segment of semiconductor fabrication.[3][4]

What do the numbers mean?

Wafer handling1

Wafer size
12 inch[1]
Accurate?

Configuration & options6

3 Poly, 1 Axiom[1]
Accurate?
Poly[2]
Accurate?
Manufacturer
Applied Materials[1]
Accurate?
Model
DPS 2[1]
Accurate?
Category
Etch[3]
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Vintage
2008[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
CENTURA DPS 2 ETCH Metal 2ch / ASP 2ch—2007Described as ETCH Metal 2ch / ASP 2ch and listed with Version 300 mm.fabsurplus.com[4]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the Applied Materials DPS 2?

The Applied Materials DPS 2 is an etch tool.[3]

Not publicly documented

The following facts about the DPS 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DPS 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the DPS 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DPS 2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DPS 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the DPS 2 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Oct 10, 2026.

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