ASML
Twinscan XT 400 F i-Line
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The ASML Twinscan XT 400 F i-Line is a scanner used in lithography. The ASML Twinscan XT 400 F i-Line uses i-line illumination. The ASML Twinscan XT 400 F i-Line handles 300 mm wafers.[1][2]
What it is
How it works
General reference — not yet source-verifiedIn a step-and-scan architecture, the reticle and wafer move in opposite directions during exposure, allowing a small slit-shaped image to traverse the entire field. The i-line wavelength provides adequate resolution for many mature-node layers. The dual-stage (Twinscan) platform enables simultaneous wafer alignment and exposure, increasing throughput.
Where it fits in the process flow
General reference — not yet source-verifiedi-line scanners are typically used for non-critical lithography layers where the resolution requirements are relaxed compared to deep-UV tools. The system is positioned between resist coating and developing tracks in the photolithography module and is used for a wide range of layers in both front-end-of-line and back-end-of-line processing.
Applications
General reference — not yet source-verifiedApplications include production of logic and memory devices at mature nodes, as well as specialty technologies such as MEMS, power semiconductors, and image sensors. The i-line wavelength is also suitable for thick-resist processes used in packaging and bumping applications.
What do the numbers mean?
Wafer handling1
Optics & imaging1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Twinscan XT 400 F i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Twinscan XT 400 F i-Line are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan XT 400 F i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan XT 400 F i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan XT 400 F i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan XT 400 F i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Twinscan XT 400 F i-Line — ASML | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 26, 2026.
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