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Axcelis

RapidStrip 210 ES

EtchAxcelis RapidStrip 210 ES family
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The Axcelis RapidStrip 210 ES is an etcher/asher system. The Axcelis RapidStrip 210 ES is configured for 8-inch wafers.[1][2]

AxcelisRapidStrip 210 ES
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Power

Ozone / Microwave Generator:[4]

Vacuum

VAT[4]

What it is

The Axcelis RapidStrip 210 ES is an etcher and asher system.[4][1]

The Axcelis RapidStrip 210 ES family is configured for 8-inch wafers.[2][4]

How it works

The Axcelis RapidStrip 210 ES uses an ozone and microwave generator, a monochromator endpoint detection system, and vacuum components in its process configuration.[4][3]

Applications

The Axcelis RapidStrip 210 ES is used for etch, ash, and clean processing in semiconductor fabrication.[3][5]

What do the numbers mean?

Power & electrical3

Ozone / Microwave Generator:[4]
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Ozone / microwave generator manufacturer
Matrix[4]
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Ozone / microwave generator model
3kW switchmode powergen[4]
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Vacuum & pumping2

Foreline Valve
VAT[4]
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Pump
IQDP 80[4]
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Wafer handling5

Can Produce Wafers As-Is[4]
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Number of Cassettes
2[4]
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Robot Type
Brooks[4]
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Wafer size
8 inch[4]
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Can produce wafers as-is
Yes[4]
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Control & software1

Software Version
1.8.7.0.06[4]
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Configuration & options27

Part Number
1080-6037[4]
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System On-Line[4]
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CE Mark Certified[4]
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All Cables Present[4]
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System Configuration:[4]
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System Type
RapidStrip 210 ES[4]
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Load Type
Standard[4]
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Install Type
Through-the-Wall[4]
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Endpoint Detection Type
Monochromator[4]
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Throttle Valve
MKS[4]
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Cooling Station[4]
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SECS/GEMS[4]
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Manufacturer
Matrix[4]
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Model
3kW switchmode powergen[4]
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OEM
Axcelis[4]
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Model
RapidStrip 210 ES[4]
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Category
Etch[1]
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Cooling station
Present[4]
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SECS/GEMS
Yes[4]
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Mechanical booster
QMB1200[4]
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System status
System on-line[4]
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CE mark
Certified[4]
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All cables present
Yes[4]
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System On-Line
Yes[4]
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CE Mark Certified
Yes[4]
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Cooling Station
Yes[4]
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Date of Manufacture
2007-12-31[3]
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Vintage & configurations

  1. 2007-12-31Date of manufacture[3]

    Date of manufacture is 2007-12-31.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Foreline ValveVAT[4]
  • ConfigurationOzone / Microwave Generator:[4]
  • Ozone / microwave generator manufacturerMatrix[4]
  • Ozone / microwave generator model3kW switchmode powergen[4]
  • PumpIQDP 80[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Axcelis RapidStrip 210 ES handle?

The Axcelis RapidStrip 210 ES is configured for 8-inch wafers.[4][1][2][3][5]

What processes is the RapidStrip 210 ES used for?

The RapidStrip 210 ES is used for etch, ash, and clean processing in semiconductor fabrication.[1]

Not publicly documented

The following facts about the RapidStrip 210 ES are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the RapidStrip 210 ES are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RapidStrip 210 ES are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RapidStrip 210 ES are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RapidStrip 210 ES is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the RapidStrip 210 ES are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Axcelis RapidStrip 210 ES family | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]macquarie.com — macquarie.commacquarie.com
  4. [4]inventory listing
  5. [5]Used 2007 Axcelis Technologies Inc. RapidStrip 210ES for Sale at Ta... — tarasemi.comtarasemi.com
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Last updated Oct 5, 2026.

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