Canon

FPA 3030 i 5+ Fine Pattern

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The Canon FPA 3030 i 5+ Fine Pattern is a semiconductor lithography stepper. The Canon FPA 3030 i 5+ Fine Pattern uses an i-line (365 nm) source. The Canon FPA 3030 i 5+ Fine Pattern is specified with 350 nm resolution, a 5:1 reduction ratio, and a 22 mm x 22 mm field size.^[1]^[2]

FPA 3030 i 5+ Fine Pattern — Inventory photo — Fig. 01FPA 3030 i 5+ Fine PatternInventory photo^[2]

Performance

≤40nm (|m|+3 )^[1]

Optics

350 nm^[2]

What it is

The Canon FPA 3030 i 5+ Fine Pattern is an i-line semiconductor lithography stepper.^[1]^[3]

How it works

The Canon FPA 3030 i 5+ uses a 5:1 reduction ratio and a field size of 22 mm by 22 mm.^[1]

Where it fits in the process flow

General reference — not yet source-verified

A lithography stepper sits early in the wafer fabrication flow, after surface preparation and photoresist coating and before development and downstream pattern transfer steps.

What do the numbers mean?

Wafer handling1

Wafer Size: 200mm; 150mm^[1]

Optics & imaging4

350 nm^[2]
Resolution: ≤0.35μm^[1]
Numerical Aperture (NA): 0.45 ~ 0.63^[1]
Reticle Size: 6in. (0.25in. thick); optional 5in.^[1]

Performance2

Overlay Accuracy: ≤40nm (|m|+3 )^[1]
Throughput: ≥104wph (200mm); ≥120wph (150mm)^[1]

Configuration & options7

22 mm x 2 mm^[2]
Make: Canon^[2]
Model: FPA 3030 i 5+^[2]
Type: Stepper^[1]
Technology: i-line (365nm)^[1]
Reduction Ratio: 5:1^[1]
Field Size: 22mm x 22mm^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What exposure type does the Canon FPA 3030 i 5+ use?

The Canon FPA 3030 i 5+ is an i-line stepper.^[1]^[3]

What is the reduction ratio of the Canon FPA 3030 i 5+?

The Canon FPA 3030 i 5+ has a 5:1 reduction ratio.^[1]

What field size does the Canon FPA 3030 i 5+ use?

The Canon FPA 3030 i 5+ has a field size of 22 mm by 22 mm.^[1]

Not publicly documented

The following facts about the FPA 3030 i 5+ Fine Pattern are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 3030 i 5+ Fine Pattern are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FPA 3030 i 5+ Fine Pattern are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPA 3030 i 5+ Fine Pattern are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FPA 3030 i 5+ Fine Pattern are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FPA 3030 i 5+ Fine Pattern is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]downloads.canon.com — downloads.canon.comdownloads.canon.com
[2]Inventory photo
[3]FPA 3030 i 5 + i-Line — Canon | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com