Canon

FPA 6000 ES 6 a KrF

Research Quality: 50% complete

The Canon FPA 6000 ES 6 a is a KrF scanner. The Canon FPA 6000 ES 6 a is specified for the 90nm node. The Canon FPA 6000 ES 6 a supports 12-inch wafers and uses a Cymer ELS-7310 laser.^[1]

FPA 6000 ES 6 a KrF — Inventory photo — Fig. 01FPA 6000 ES 6 a KrFInventory photo^[1]

Performance

Uniformity (1.811%)^[1]

Optics

6" Reticle Inline (R->L)^[1]

What it is

The Canon FPA 6000 ES 6 a is a KrF scanner used in semiconductor lithography.^[2]^[1]^[3]

How it works

The system uses a Cymer laser module, specifically the ELS-7310 model, as its illumination source.^[1]

Where it fits in the process flow

General reference — not yet source-verified

Lithography scanners are positioned after wafer cleaning and resist coating steps and are followed by pattern transfer steps such as etching or ion implantation.

Applications

General reference — not yet source-verified

KrF scanners are generally used for critical-layer patterning in mature-node CMOS manufacturing as well as for non-critical layers in more advanced nodes.

What do the numbers mean?

Wafer handling2

Wafer Size: 12 inch (300mm)^[1]
Wafer size: 12 inch^[1]

Optics & imaging8

6" Reticle Inline (R->L)^[1]; Cymer Laser (ELS-7310)^[1]
Resolution / Node: 90nm^[1]
Laser Source: Cymer ELS-7310^[1]
Reticle Size: 6 inch^[1]
Reticle Configuration: Inline (R->L)^[1]
Reticle: 6 inch reticle inline (R->L)^[1]
Laser source: Cymer Laser (ELS-7310)^[1]

Performance2

Uniformity (1.811%)^[1]
Uniformity: 1.811%^[1]

Configuration & options10

90nm^[2]; Intensity (24299.68W/m2)^[1]
Manufacturer: Canon^[2]
Model: FPA 6000 ES 6 a^[2]
Type: KrF Scanner^[2]
Intensity: 24299.68 W/m²^[1]
Make: Canon^[2]
Equipment type: KrF Scanner^[2]
Process node: 90nm^[1]
Intensity: 24299.68 W/m2^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the resolution of the Canon FPA 6000 ES 6 a?

The system has a resolution of 90nm.^[2]^[1]^[3]

What reticle size does the Canon FPA 6000 ES 6 a use?

The system uses a 6-inch reticle.^[1]

What type of laser does the Canon FPA 6000 ES 6 a use?

The system is equipped with a Cymer ELS-7310 laser.^[1]

Is the Canon FPA 6000 ES 6 a a KrF scanner?

Yes, the system is a KrF scanner.^[2]^[1]^[3]

Not publicly documented

The following facts about the FPA 6000 ES 6 a KrF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 6000 ES 6 a KrF are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FPA 6000 ES 6 a KrF are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPA 6000 ES 6 a KrF are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FPA 6000 ES 6 a KrF are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FPA 6000 ES 6 a KrF is not on record.
Answerable by: an OEM datasheet or a fab qualification report