Canon
MPA 600 Super Mirror Projection Mask
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Vacuum
2KW High Pressure Mercury Lamp[2]
Performance
< + 1.5%[2]
Optics
Super Mirror Projection Mask Aligner[1]
What it is
How it works
Applications
The Canon MPA 600 Super is used for semiconductor lithography on VLSI devices.[2]
What do the numbers mean?
Power & electrical1
- Required facilities
- 200 VAC, 3Phase, 6 kVA, 50/60Hz; Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz; CDA(Clean Dry Air)Pressure: minimum 6.5 kg/cm2, flow rate 130 lit/min; Vacum: 50 cmHg or more; Exhaust Flow(for illuminator): 6.5 m/sec to 9.5 m/sec (measured at illuminator output)[2]
Vacuum & pumping1
Wafer handling4
- Throughput (6 inch wafer)
- > 89 wfs/h (first mask mode); > 77 wfs/h (LBS AA mode); > 68 wfs/h (TVAA mode)[2]
Optics & imaging8
- Auto alignment accuracy
- LBS AA 3sigma < 0.58um (HeNe laser beam scan); TV AA 3sigma < 0.43um (TV image processing)[2]
Performance1
Dimensions & facilities1
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Illumination2KW High Pressure Mercury Lamp[2]
- Required facilities200 VAC, 3Phase, 6 kVA, 50/60Hz; Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz; CDA(Clean Dry Air)Pressure: minimum 6.5 kg/cm2, flow rate 130 lit/min; Vacum: 50 cmHg or more; Exhaust Flow(for illuminator): 6.5 m/sec to 9.5 m/sec (measured at illuminator output)[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the Canon MPA 600 Super?
The Canon MPA 600 Super is a 1:1 mirror projection mask aligner.[2]
Not publicly documented
The following facts about the MPA 600 Super Mirror Projection Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MPA 600 Super Mirror Projection Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MPA 600 Super Mirror Projection Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MPA 600 Super Mirror Projection Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MPA 600 Super Mirror Projection Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MPA 600 Super Mirror Projection Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]servtechinc.com — servtechinc.comservtechinc.com
- [3]MPA 600 Super Mirror Projection Mask — Canon | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
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