Waferpedia

Disco

DFD 651 Automatic Dicing

Dicing & GrindingDisco DFD family
Research Quality: 50% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Disco DFD 651 is an automatic dicing saw for semiconductor wafer dicing. The Disco DFD 651 features dual 1000W synchro spindles and supports 6-inch and 8-inch wafers.[1][2][3]

DFD 651 Automatic Dicing — Inventory photo
Fig. 01DFD 651 Automatic DicingInventory photo[4]

Vacuum

High Pressure Spinner Cleaning Unit[1]

Performance

Macro/Micro Automatic Alignment[1]

Optics

Yes[1]

What it is

The Disco DFD 651 is an automatic dicing saw used for semiconductor wafer singulation.[9][11][12][2][3]

The DFD 651 is a Disco model designation.[9][11][12][2][3]

How it works

General reference — not yet source-verified

A dicing saw separates processed wafers into individual dies by cutting along scribe streets with a rotating blade or similar cutting tool.

An automatic dicing saw typically uses staged wafer handling, precision motion control, and cutting alignment to position each wafer and carry out repeated cuts with limited manual intervention.

Where it fits in the process flow

General reference — not yet source-verified

A dicing saw is used near the end of wafer fabrication, after front-end device processing and before assembly or packaging.

The machine converts a finished wafer into separate die units for downstream handling in assembly operations.

Applications

The Disco DFD 651 is used in semiconductor manufacturing for wafer dicing.[9][11][12][2][3]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Non-operational

What do the numbers mean?

Vacuum & pumping1

Cleaning Unit
High Pressure Spinner Cleaning Unit[1]
Accurate?

Wafer handling4

Wafer Sizes
6 inch, 8 inch[2]
Accurate?
Chuck Table
8-inch Universal Chuck Table[1]
Accurate?
Chuck
8-inch Porous Chuck[10]
Accurate?
Wafer size
6, 8 inch[2]
Accurate?

Optics & imaging2

Broken Blade Detector
Yes[1]
Accurate?
Monitor
12-inch Monitor with Camera[1]
Accurate?

Performance1

Alignment
Macro/Micro Automatic Alignment[1]
Accurate?

Configuration & options13

Non-operational[9]
Accurate?
Type
Automatic Dicing Saw[9]
Accurate?
Spindle
Dual 1000W Synchro Spindle[1]
Accurate?
Setup
Non Contact Setup[1]
Accurate?
Theta
Motorized 360°[1]
Accurate?
BBD and NCS
Yes[10]
Accurate?
Product type
Automatic Dicing Saw[9]
Accurate?
Make
Disco[9]
Accurate?
Model
DFD 651[9]
Accurate?
Operation
Automatic[9]
Accurate?
OEM
Disco[9]
Accurate?
Equipment type
Automatic dicing saw[9]
Accurate?
Vintage
1999[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Cleaning UnitHigh Pressure Spinner Cleaning Unit[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What wafer sizes does the Disco DFD 651 support?

The DFD 651 supports 6 inch and 8 inch wafer sizes.[2][3]

Is the DFD 651 fully automatic?

Yes, the DFD 651 is a fully automatic dicing saw.[1][10]

What spindle configuration does the DFD 651 use?

The DFD 651 features dual 1000 watt synchro spindles.[1]

Does the DFD 651 include a broken blade detection system?

Yes, the DFD 651 includes a broken blade detector.[1][10]

What alignment capabilities does the DFD 651 have?

The DFD 651 provides macro/micro automatic alignment.[1]

What type of chuck table is used on the DFD 651?

The DFD 651 is equipped with an 8 inch universal chuck table; some units include a porous chuck.[1][10]

Not publicly documented

The following facts about the DFD 651 Automatic Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 651 Automatic Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFD 651 Automatic Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFD 651 Automatic Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the DFD 651 Automatic Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the DFD 651 Automatic Dicing are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (13)Every fact above is drawn from these public sources
  1. [1]gtsaz.com — gtsaz.comgtsaz.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]Inventory photo
  9. [9]inventory listing
  10. [10]classoneequipment.com — classoneequipment.comclassoneequipment.com
  11. [11]Equipment inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing
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Last updated Oct 8, 2026.

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